Sweeping the lean angle can strengthen film thickness uniformity and sidewall coverage when also avoiding significant Strength-mirrored neutral species for critical processes.
In-situ optical monitoring and Management is out there by way of Angstrom’s optical monitoring & control package deal.
Goal rotation and carousel indexing Each individual have torque sense, avoiding any course of action complications resulting from slips or jams in rotation.
In-situ ellipsometry provides vital information on the efficiency of an optical film whilst it is becoming deposited.
Our Reticle® ion beam sputter deposition methods are created and engineered to develop exact optical films of the highest purity, density, and steadiness.
Variable angle levels allow for really powerful skinny movie methods. However, among its most significant worries is reproducibility. The substrate is frequently established at a very oblique angle in relation for the source, and the films are really sensitive into the precision of the angle.
Angstrom went to fantastic lengths to refine the tolerances of the lean angle, increasing it from the variation of approximately a full diploma on non-Angstrom methods I’ve used to lower than 0.
Our one of a kind design and style permits direct or indirect checking of your variable angle stage, getting rid of the necessity for tooling variables or possibly a witness glass changer. Find out more regarding the Optical Checking & Manage deal right here.
In conjunction with sample rotation, the variable angle stage that's utilized for Reticle® supplies for in-developed angular movement throughout the deposition flux.
The IBSD course of action makes a very energetic flux of deposition materials, bringing about movies with improved density, hardness, and area roughness in comparison to People deposited by evaporation processes.
The deposition Titanium for deposition processes ion source is directed towards a material concentrate on which has been optimized in both of those sizing and placement for your required deposition geometry.
Self-aligned ion optics are configured especially for the specified deposition demands and geometry of one's course of action.
Angstrom Engineering’s Reticle® methods offer a change-essential Alternative for anyone wanting to realize any optical layout into a large-general performance film.
A shuttered QCM located close to the substrate delivers feed-back over the deposition charge and Bodily thickness of your escalating movie.
Each and every axis of movement is managed by way of Aeres® making use of precision servo motors, supplying better than 0.1 degrees of positional precision. Entrance side infrared heating bulbs tilt Using the phase to supply a consistent temperature profile for reactive processes.